Taiwan mask Semiconductor   The PR-PD3 is a scanning machine used to detect small particles, primarily applied in the semiconductor manufacturing process for Particle Scan. Its function is to detect particle defects that may affect product quality during the manufacturing process, especially tiny contaminants. The machine uses the principles of Mie Scattering, polarized differential method, and low-pass filtering to accurately identify and screen particle defects. The PR-PD3 is a professional particle detection machine, typically used in semiconductor processes or other high-precision industrial applications. As it is a high-end device, its market price and second-hand value are influenced by several factors, including market demand, the condition of the equipment, and whether it includes warranty or additional accessories.

Specification Attribute	Specification Value
Inspection object	Particles on reticle/mask with or without pellicle
Principle	Laser scattering method
Inspection time	Approx. 7 min/2 surfaces (5 inch reticle), Approx. 7 min from inspection start (switch ON) to test result display for two surface (5 inchs) inspection * High throughput model specific to the glass/pellicle (approx. 4 min. for two surface inspection) is also available.
Detectable particle size	Pattern surface: 0.5 µm, Glass surface: 5.0 µm, Pellicle surface: 10.0 µm (* PSL equivalent)
Reticle size	5, 6 or 7 inch (Please specify when ordering.)
Reticle cassette (Please specify when ordering)	Applicable to the HORIBA standard cassette for 5, 6, 7 inches as well as stepper cases unique to individual maker for 5, 6 inches. (Single size of reticle and cassette handling is the standard. Contact us as to the multiple cassette handling system.)
Inspection result	Data mapping display on the FPD
Dimensions	Approx. 900 (W) x 1350 (D) x 1590 (H) mm Approx. 35.4 (W) x 53.1 (D) x 62.6 (H) in (Dimensions will vary depending on the reticle cassette specifications.)
Utilities
Installation site	Clean room or clean booth, class 100 or better
Temperature	23 ±1°C
Power	100 to 230 V AC, 7.5 to 5 A, 50/60 Hz, single phase
Vacuum source	Pressure difference 8.0 x 104 Pa or more, 50 L/min

• Item No: SOTW70069   
• Please let me know if you have any questions